Invention Grant
- Patent Title: Apparatus for manufacturing display apparatus and method of manufacturing display apparatus
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Application No.: US16111037Application Date: 2018-08-23
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Publication No.: US10573851B2Publication Date: 2020-02-25
- Inventor: Choelmin Jang , Dongkyun Ko , Inkyo Kim , Sukwon Jung , Nam Ha , Myungsoo Huh
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2015-0014589 20150129
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/52 ; H01L51/00 ; C23C16/44 ; C23C16/455 ; C23C16/54

Abstract:
An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.
Public/Granted literature
- US20180366688A1 APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS Public/Granted day:2018-12-20
Information query
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