Invention Grant
- Patent Title: Process for manufacturing a MEMS pressure sensor, and corresponding MEMS pressure sensor
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Application No.: US15958461Application Date: 2018-04-20
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Publication No.: US10578505B2Publication Date: 2020-03-03
- Inventor: Lorenzo Baldo , Sarah Zerbini , Enri Duqi
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102016000033308 20160331
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00 ; B81C1/00 ; B81B7/00

Abstract:
A process for manufacturing a MEMS pressure sensor having a micromechanical structure envisages: providing a wafer having a substrate of semiconductor material and a top surface; forming a buried cavity entirely contained within the substrate and separated from the top surface by a membrane suspended above the buried cavity; forming a fluidic-communication access for fluidic communication of the membrane with an external environment, set at a pressure the value of which has to be determined; forming, suspended above the membrane, a plate made of polysilicon, separated from the membrane by an empty space; and forming electrical-contact elements for electrical connection of the membrane and of the plate, which are designed to form the plates of a sensing capacitor, the value of capacitance of which is indicative of the value of pressure to be detected. A corresponding MEMS pressure sensor having the micromechanical structure is moreover described.
Public/Granted literature
- US20180299337A1 PROCESS FOR MANUFACTURING A MEMS PRESSURE SENSOR, AND CORRESPONDING MEMS PRESSURE SENSOR Public/Granted day:2018-10-18
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