Invention Grant
- Patent Title: 1-1 fin forced stack inverter
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Application No.: US15912526Application Date: 2018-03-05
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Publication No.: US10580883B2Publication Date: 2020-03-03
- Inventor: Kuo-Hsing Lee , Yi-Chung Sheng , Sheng-Yuan Hsueh , Chih-Kai Kang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW107104758A 20180209
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L27/092 ; H01L21/8238 ; H01L21/8234 ; H01L27/088 ; H01L27/12 ; H01L21/84

Abstract:
A method of forming a fin forced stack inverter includes the following steps. A substrate including a first fin, a second fin and a third fin across a first active area along a first direction is provided, wherein the first fin, the second fin and the third fin are arranged side by side. A fin remove inside active process is performed to remove at least a part of the second fin in the first active area. A first gate is formed across the first fin and the third fin in the first active area along a second direction. The present invention also provides a 1-1 fin forced fin stack inverter formed by said method.
Public/Granted literature
- US20190252518A1 1-1 FIN FORCED STACK INVERTER AND METHOD OF FORMING FIN FORCED STACK INVERTER Public/Granted day:2019-08-15
Information query
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