Invention Grant
- Patent Title: Grating couplers with multiple configurations
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Application No.: US16000249Application Date: 2018-06-05
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Publication No.: US10585219B2Publication Date: 2020-03-10
- Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: G02B6/34
- IPC: G02B6/34 ; G02B5/18 ; G02B6/42 ; G02B6/12 ; G02B6/293 ; G02B6/124

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A grating coupler structure includes: a polysilicon material with a first grating coupling pattern; a SiN material with second grating coupling pattern; a dielectric material covering the polysilicon material and the SiN material; and a back end of line (BEOL) multilayer stack over the dielectric material.
Public/Granted literature
- US20190369309A1 GRATING COUPLERS WITH MULTIPLE CONFIGURATIONS Public/Granted day:2019-12-05
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