Invention Grant
- Patent Title: Optical waveguide, fabrication methods, and applications
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Application No.: US16064537Application Date: 2016-12-20
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Publication No.: US10585241B2Publication Date: 2020-03-10
- Inventor: Sasan Fathpour , Jeffrey Chiles
- Applicant: UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC.
- Applicant Address: US FL Orlando
- Assignee: UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC.
- Current Assignee: UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC.
- Current Assignee Address: US FL Orlando
- Agency: Klintworth & Rozenblat IP LLP
- International Application: PCT/US2016/067766 WO 20161220
- International Announcement: WO2017/112663 WO 20170629
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/122 ; G02B6/136

Abstract:
The present invention is an integrated photonics platform is created through the application of a polymer and silicon dioxide mask, multiple anisotropic etchings with inductively-coupled plasma reactive-ion-etching and a brief isotropic silicon etching to produce a a T-shaped silicon base wafer. A silicon-on-insulator donor wafer is bonded to the silicon base wafer a silicon dioxide layer between the two wafers is removed, producing a finalized T-shaped optical waveguide. The T-shaped optical waveguide causes confinement of the optical mode in the upper region of the “T,” above the connection to the post. This shape prevents leakage of light into the silicon wafer.
Public/Granted literature
- US20180372953A1 Optical Waveguide, Fabrication Methods, and Applications Public/Granted day:2018-12-27
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