Hierarchical trim management for self-aligned double patterning
Abstract:
Embodiments of the invention are directed to methods, systems, and computer program products for the hierarchical management of self-aligned double patterning (SADP) trim shapes. Non-limiting embodiments of the invention include receiving, by a processor, one or more virtual trim shapes at a boundary between a parent hierarchy block and a child hierarchy block. The trim shapes are aligned to a legal trim grid. The processor then places one or more trim shapes aligned with the legal trim grid.
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