Invention Grant
- Patent Title: Field emission electron source, method for manufacturing same, and electron beam device
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Application No.: US16081372Application Date: 2016-11-24
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Publication No.: US10586674B2Publication Date: 2020-03-10
- Inventor: Toshiaki Kusunoki , Tomihiro Hashizume , Keigo Kasuya , Takashi Ohshima , Yusuke Sakai , Yoichi Ose , Noriaki Arai
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2016-038898 20160301
- International Application: PCT/JP2016/084726 WO 20161124
- International Announcement: WO2017/149862 WO 20170908
- Main IPC: H01J37/073
- IPC: H01J37/073 ; H01J1/22 ; H01J1/304 ; H01J9/02 ; H01J37/28

Abstract:
In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.
Public/Granted literature
- US20190066966A1 Field Emission Electron Source, Method for Manufacturing Same, and Electron Beam Device Public/Granted day:2019-02-28
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