Invention Grant
- Patent Title: Method for optimizing dry absorber efficiency and lifetime in epitaxial applications
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Application No.: US15934679Application Date: 2018-03-23
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Publication No.: US10586744B2Publication Date: 2020-03-10
- Inventor: David K. Carlson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B01D53/04
- IPC: B01D53/04 ; H01L21/66 ; C23C16/44 ; H01L21/02 ; H01L21/67 ; G01N21/3504 ; G01N30/02 ; G01J3/42 ; G01N21/35 ; G01N21/84 ; G01N21/78
Abstract:
Increasing efficiency of absorbers is provided herein. In some embodiments, a method of processing a substrate may include determining a quantity of a removal species in an effluent stream flowing from a semiconductor processing chamber, wherein determining comprises: detecting or predicting a quantity of the removal species upstream of a chamber abatement apparatus in the effluent stream flowing from the semiconductor processing chamber; and removing the removal species from the effluent stream with the chamber abatement apparatus if the determined quantity of the removal species exceeds a threshold value of the removal species.
Public/Granted literature
- US20180277455A1 METHOD FOR OPTIMIZING DRY ABSORBER EFFICIENCY AND LIFETIME IN EPITAXIAL APPLICATIONS Public/Granted day:2018-09-27
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