Invention Grant
- Patent Title: Assembly including plural through wafer vias, method of cooling the assembly and method of fabricating the assembly
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Application No.: US15817763Application Date: 2017-11-20
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Publication No.: US10586760B2Publication Date: 2020-03-10
- Inventor: Kerry Bernstein , Thomas Brunschwiler , Bruno Michel
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: McGinn IP Law Group, PLLC
- Agent Vazken Alexanian
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/46 ; H01L23/34 ; H01L23/473 ; H01L23/488 ; H01L21/768 ; H01L25/065

Abstract:
An assembly includes a chip including an integrated circuit, a casing including an integrated circuit including plural active elements and including an upper portion formed on a side of the chip, a lower portion formed on another side of the chip, and a cooling inlet and a cooling outlet for transferring a coolant, provided in the casing, and for forming outer sidewalls of the upper portion and inner sidewalls of the lower portion, plural through-wafer vias for electrically connecting the integrated circuit of the chip and the integrated circuit of the casing, and a card connected to the casing for electrically connecting the casing to a system board. The outer sidewalls of the upper portion of the casing are located between vertical planes defined by opposing outer sidewalls of the lower portion of the casing.
Public/Granted literature
Information query
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