Invention Grant
- Patent Title: Interrupted small block shape
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Application No.: US15860171Application Date: 2018-01-02
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Publication No.: US10586762B2Publication Date: 2020-03-10
- Inventor: Guillaume Bouche , Lars W. Liebmann
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/28 ; H01L23/538

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to interrupted small block shape structures (e.g., cut metal lines forming cell boundaries) and methods of manufacture. The structure includes: a plurality of wiring lines with cuts that form a cell boundary; and at least one wiring line extending beyond the cell boundary and which is continuous from cell to cell.
Public/Granted literature
- US20190206787A1 INTERRUPTED SMALL BLOCK SHAPE Public/Granted day:2019-07-04
Information query
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