Invention Grant
- Patent Title: Embedded graphite heat spreader for 3DIC
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Application No.: US15927494Application Date: 2018-03-21
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Publication No.: US10586785B2Publication Date: 2020-03-10
- Inventor: Guilian Gao , Charles G. Woychik , Cyprian Emeka Uzoh , Liang Wang
- Applicant: Invensas Corporation
- Applicant Address: US CA San Jose
- Assignee: Invensas Corporation
- Current Assignee: Invensas Corporation
- Current Assignee Address: US CA San Jose
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/36 ; H01L23/00 ; H01L23/367 ; H01L23/373 ; H01L25/00

Abstract:
A device with thermal control is presented. In some embodiments, the device includes a plurality of die positioned in a stack, each die including a chip, interconnects through a thickness of the chip, metal features of electrically conductive composition connected to the interconnects on a bottom side of the chip, and adhesive or underfill layer on the bottom side of the chip. At least one thermally conducting layer, which can be a pyrolytic graphite layer, a layer formed of carbon nanotubes, or a graphene layer, is coupled between a top side of one of the plurality of die and a bottom side of an adjoining die in the stack. A heat sink can be coupled to the thermally conducting layer.
Public/Granted literature
- US20180219001A1 EMBEDDED GRAPHITE HEAT SPREADER FOR 3DIC Public/Granted day:2018-08-02
Information query
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