Invention Grant
- Patent Title: MEMS microphone
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Application No.: US16134355Application Date: 2018-09-18
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Publication No.: US10589990B2Publication Date: 2020-03-17
- Inventor: Alfons Dehe , Ulrich Krumbein , Gerhard Metzger-Brueckl , Johann Strasser , Juergen Wagner , Arnaud Walther
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102017121705 20170919
- Main IPC: B81B7/02
- IPC: B81B7/02 ; H04R19/00 ; H04R19/04 ; H04R1/28

Abstract:
In accordance with an embodiment, a MEMS microphone includes a sound detection unit having a first membrane, a second membrane arranged at a distance from the first membrane, a low-pressure region arranged between the first membrane and the second membrane, a gas pressure that is reduced in relation to normal pressure being present in said low-pressure region, a counter electrode arranged in the low-pressure region, and a sound through-hole, which extends through the sound detection unit in a thickness direction of the sound detection unit; and a valve provided at the sound through-hole, said valve being configured to adopt a plurality of valve states, wherein a predetermined degree of transmission of the sound through-hole to sound is assigned to each valve state.
Public/Granted literature
- US20190084827A1 MEMS Microphone Public/Granted day:2019-03-21
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