Invention Grant
- Patent Title: MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging
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Application No.: US15265111Application Date: 2016-09-14
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Publication No.: US10591507B2Publication Date: 2020-03-17
- Inventor: Alessandro Tocchio , Gabriele Gattere
- Applicant: STMicroelectronics S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102016000033301 20160331
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B3/00 ; G01P15/08

Abstract:
A MEMS accelerometric sensor includes a bearing structure and a suspended region that is made of semiconductor material, mobile with respect to the bearing structure. At least one modulation electrode is fixed to the bearing structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency. At least one variable capacitor is formed by the suspended region and by the modulation electrode in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal. A sensing assembly generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal indicating the position of the suspended region with respect to the bearing structure and includes a frequency-modulated component that is a function of the acceleration and of the first frequency.
Public/Granted literature
- US20170285064A1 MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGING Public/Granted day:2017-10-05
Information query
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