Invention Grant
- Patent Title: Microfabricated atomic clocks and magnetometers utilizing side recesses
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Application No.: US15457608Application Date: 2017-03-13
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Publication No.: US10591872B2Publication Date: 2020-03-17
- Inventor: Roozbeh Parsa , Iouri N Mirgorodski , William French , Nathan Brockie , Ann Gabrys , Terry Dyer
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G04F5/14 ; H03L7/26

Abstract:
An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.
Public/Granted literature
- US20180259600A1 MICROFABRICATED ATOMIC CLOCKS AND MAGNETOMETERS UTILIZING SIDE RECESSES Public/Granted day:2018-09-13
Information query
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