Invention Grant
- Patent Title: Deep fence isolation for logic cells
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Application No.: US16129221Application Date: 2018-09-12
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Publication No.: US10593674B1Publication Date: 2020-03-17
- Inventor: Ming-Cheng Chang , Nigel Chan , Elliot John Smith
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/092 ; H03K19/0948 ; H01L21/762 ; H01L29/423 ; H01L21/8238 ; H01L29/06 ; H01L27/088 ; H01L27/02

Abstract:
Structures for field-effect transistors and methods for fabricating a structure for field-effect transistors. A logic cell includes first and second field-effect transistors and a well defining a back gate that is arranged beneath the first and second field-effect transistors. A dielectric layer is arranged between the well and the logic cell. A plurality of deep trench isolation regions extend through the dielectric layer and are arranged to surround the first and second field-effect transistors and the well. The back gate is shared by the first and second field-effect transistors.
Public/Granted literature
- US20200083223A1 DEEP FENCE ISOLATION FOR LOGIC CELLS Public/Granted day:2020-03-12
Information query
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