- 专利标题: Method for producing pillar-shaped semiconductor memory device
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申请号: US16296564申请日: 2019-03-08
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公开(公告)号: US10593682B2公开(公告)日: 2020-03-17
- 发明人: Fujio Masuoka , Nozomu Harada
- 申请人: Unisantis Electronics Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Brinks Gilson & Lione
- 主分类号: H01L21/285
- IPC分类号: H01L21/285 ; H01L27/11 ; H01L29/423 ; H01L29/786 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L29/78 ; H01L29/45 ; H01L29/49
摘要:
A method for producing a semiconductor memory device includes forming two Si pillars on a substrate. In the Si pillars, inverter circuits are formed. The inverter circuits include drive N-channel SGTs each including first and second N+ layers functioning as a source and a drain, and load SGTs each including first and second P+ layers functioning as a source and drain. Selection SGTs each including third and fourth N+ layers functioning as a source and a drain are formed above SiO2 layers disposed above the inverter circuits. The first N+ layer is connected to a ground wiring metal layer. The first P+ layers are connected to a power supply wiring metal layer through a NiSi layer. Gate TiN layers are connected to a word-line wiring metal layer through a NiSi layer. The third N+ layers are connected to an inverted bit-line wiring metal layer and a bit-line wiring metal layer.
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