- 专利标题: Method for handling a product substrate and a bonded substrate system
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申请号: US16102174申请日: 2018-08-13
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公开(公告)号: US10600690B2公开(公告)日: 2020-03-24
- 发明人: Georg Meyer-Berg , Claus von Waechter , Michael Bauer , Holger Doepke , Dominic Maier , Daniel Porwol , Tobias Schmidt
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Murphy, Bilak & Homiller, PLLC
- 优先权: DE102015100863 20150121
- 主分类号: B32B37/26
- IPC分类号: B32B37/26 ; B32B38/10 ; H01L21/78 ; H01L21/683 ; H01L21/56 ; H01L23/00 ; B32B7/027 ; H05K3/00 ; B32B7/06
摘要:
A method for handling a product substrate includes bonding a carrier to the product substrate by: applying a layer of a temporary adhesive having a first coefficient of thermal expansion onto a surface of the carrier; and bonding the carrier to the product substrate using the applied temporary adhesive. A surface of the temporary adhesive is in direct contact to a surface of the product substrate. The temporary adhesive includes or is adjacent a filler material having a second coefficient of thermal expansion which is smaller than the first coefficient of thermal expansion, so that stress occurs inside the temporary adhesive layer or at an interface to the product substrate or the carrier during cooling down of the temporary adhesive layer.
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