Invention Grant
- Patent Title: Manufacturing method of semiconductor memory device
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Application No.: US15987919Application Date: 2018-05-24
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Publication No.: US10600790B2Publication Date: 2020-03-24
- Inventor: Li-Wei Feng , Yu-Cheng Tung
- Applicant: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Agent Winston Hsu
- Priority: CN201710560153 20170711
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L27/105 ; H01L27/11573 ; H01L29/66 ; H01L29/51 ; H01L29/78

Abstract:
A manufacturing method of a semiconductor memory device includes the following steps. A semiconductor substrate is provided. A memory cell region and a peripheral region are defined on the semiconductor substrate. A dielectric layer is formed on the semiconductor substrate. A first trench penetrating the dielectric layer is formed on the memory cell region, and a second trench penetrating the dielectric layer is formed on the peripheral region. A metal conductive layer is formed. The first trench and the second trench are filled with the metal conductive layer for forming a bit line metal structure in the first trench and a first metal gate structure in the second trench. In the present invention, the replacement metal gate process is used to form the bit line metal structure for reducing the electrical resistance of the bit lines.
Public/Granted literature
- US20190019805A1 MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-01-17
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