Invention Grant
- Patent Title: System for and method of monitoring flow through mass flow controllers in real time
-
Application No.: US15419047Application Date: 2017-01-30
-
Publication No.: US10606285B2Publication Date: 2020-03-31
- Inventor: Junhua Ding
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G01F1/88 ; G01F15/00 ; G01F25/00
Abstract:
A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.
Public/Granted literature
- US20170199529A1 SYSTEM FOR AND METHOD OF MONITORING FLOW THROUGH MASS FLOW CONTROLLERS IN REAL TIME Public/Granted day:2017-07-13
Information query
