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公开(公告)号：US20250053182A1
公开(公告)日：2025-02-13
申请号：US18448791
申请日：2023-08-11
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
IPC: G05D7/06
Abstract: A mass flow controller and methods of providing for mass flow control are provided. A mass flow controller includes a control valve configured to control flow of a fluid in a flow path. A first flow sensor detects a first set of fluid flow parameters, and a second flow sensor detects a second set of fluid flow parameters. The first and second flow sensors are of distinct flow measurement types. The mass flow controller further includes a controller configured to determine a set of first mass flow rates based on the first set of fluid flow parameters detected by the first flow sensor and calibrate the second flow sensor based on the determined set of mass flow rates of the first mass flow sensor and the second set of fluid flow parameters.
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公开(公告)号：US12000723B2
公开(公告)日：2024-06-04
申请号：US17651751
申请日：2022-02-18
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
CPC classification number: G01F1/88 , G01F15/005 , G01F15/002 , G01F15/003 , G05D7/00 , G05D16/028
Abstract: Mass flow controllers that can provide for improved bleeding time and can be manufactured with less complexity and cost are provided. A mass flow controller includes a body having a valve outlet bore defining a flow path and an adjustable valve configured to control flow of a gas through the flow path. A valve element includes an outlet orifice of the adjustable valve and is disposed within the bore. The mass flow controller further includes a pressure drop element disposed coaxially with the valve element within the bore. An upstream pressure sensor is configured to detect a pressure at a location in the flow path between the adjustable valve and the pressure drop element, and a controller is configured to determine a flow rate through the flow path based on pressure as detected by the upstream pressure sensor.
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公开(公告)号：US11513108B2
公开(公告)日：2022-11-29
申请号：US16742172
申请日：2020-01-14
Applicant: MKS Instruments, Inc.
Inventor： Jim Ye , Vidi Saptari , Junhua Ding
Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
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公开(公告)号：US10606285B2
公开(公告)日：2020-03-31
申请号：US15419047
申请日：2017-01-30
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
Abstract: A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.
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公开(公告)号：US20190339725A1
公开(公告)日：2019-11-07
申请号：US15973190
申请日：2018-05-07
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Wayne Cole
Abstract: Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.
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Patent Agency Ranking
公开(公告)号：US20190243392A1
公开(公告)日：2019-08-08
申请号：US15887447
申请日：2018-02-02
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Gordon Hill
IPC: G05D7/06 , G01F1/36 , C23C16/52 , C23C16/455
CPC classification number: G05D7/0647 , C23C16/45525 , C23C16/52 , G01F1/36 , G01F1/363 , G01F15/005
Abstract: A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
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公开(公告)号：US10031004B2
公开(公告)日：2018-07-24
申请号：US15380682
申请日：2016-12-15
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Wayne Cole
IPC: G01F1/34
Abstract: A mass flow verifier (MFV) that is space-efficient and can verify flow rates for unknown fluids over a wide range of flow rates includes a chamber configured to receive a fluid, a critical flow nozzle connected to the chamber, and first and second pressure sensors that, respectively, detect fluid pressure in the chamber and upstream of the critical flow nozzle. A controller of the MFV is configured to verify flow rate of the fluid by, (i) at a first flow range, measuring a first flow rate based on a rate of rise in pressure of the fluid as detected by the first pressure sensor and determining a gas property function of the fluid based on pressures as detected by the first second pressure sensors, and (ii) at a second flow range, measuring a second flow rate based on pressure detected by the second pressure sensor and the determined gas property function.
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公开(公告)号：US20230304837A1
公开(公告)日：2023-09-28
申请号：US17656177
申请日：2022-03-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
CPC classification number: G01F1/42 , G01F1/86 , G05D7/0629
Abstract: Devices and methods for mass flow verification are provided. A mass flow verifier includes a chamber configured to receive a fluid, a critical flow nozzle upstream of the chamber, a chamber valve, a downstream valve, and a bypass valve. The chamber valve is configured to selectively enable fluid flow from the critical flow nozzle to the chamber. The downstream valve is configured to selectively enable fluid flow from the chamber to a downstream location. The bypass valve is configured to selectively enable fluid flow from the critical flow nozzle to a dump location. The mass flow verifier further includes a controller configured to verify flow rate of the fluid based on a rate of rise in pressure of the fluid as detected by a pressure sensor in the chamber.
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公开(公告)号：US20220147070A1
公开(公告)日：2022-05-12
申请号：US17452953
申请日：2021-10-29
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Mark J. Quaratiello
Abstract: A gas delivery system and associated method includes a flow channel, a control valve, a downstream pressure sensor, and a controller. The control valve controls flow of gas in the flow channel. The downstream pressure sensor, located downstream of the control valve, measures gas pressure in the flow channel. The controller has an external trigger input to receive a trigger signal applied to a shutoff valve downstream from the control valve. The controller operates in separate modes based on a state of the trigger signal. In a non-triggered mode, the controller controls pressure at the pressure sensor via the control valve in accordance with a first gain schedule. In the triggered mode, the controller controls the pressure at the pressure sensor via the control valve in accordance with a second gain schedule that is distinct from the first gain schedule.
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公开(公告)号：US10801867B2
公开(公告)日：2020-10-13
申请号：US16020415
申请日：2018-06-27
Applicant: MKS INSTRUMENTS, INC.
Inventor： Junhua Ding
Abstract: A mass flow control system can be self verified for its accuracy when controlling a flow to a process. The system comprises: a control valve for controlling the flow of fluid through the system as a function of a control signal; a controller for generating the control signal as a function of measured flow of fluid through the system and a targeted flow set point; a pressure sensor for measuring the controlling fluid pressure for use in measuring and verifying the flow rate; and a source of fluid for providing a known volume of fluid for use in verifying the system accuracy anytime between steps of the flow control process.
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