- Patent Title: Wafer, piezoelectric vibrator element, and piezoelectric vibrator
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Application No.: US15704539Application Date: 2017-09-14
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Publication No.: US10608558B2Publication Date: 2020-03-31
- Inventor: Naoya Ichimura
- Applicant: SII Crystal Technology Inc.
- Applicant Address: JP Chiba
- Assignee: SII CRYSTAL TECHNOLOGY INC.
- Current Assignee: SII CRYSTAL TECHNOLOGY INC.
- Current Assignee Address: JP Chiba
- Agency: Brinks Gilson & Lione
- Priority: JP2016-190823 20160929
- Main IPC: H02N2/00
- IPC: H02N2/00 ; H03H9/215 ; H03H9/10 ; H01L41/053 ; H01L41/09 ; H01L41/253 ; H01L41/29 ; H01L41/338 ; H03H3/04 ; H03H9/13

Abstract:
There is provided a wafer making it possible to stably break off the piezoelectric vibrator element. The wafer includes a piezoelectric vibrator element, a frame part, and a connection part adapted to connect the piezoelectric vibrator element and the frame part to each other, and the connection part is provided with a guide part adapted to guide force, which is applied to the connection part from one surface side in the thickness direction of the connection part when breaking off the piezoelectric vibrator element from the frame part at the connection part, to at least one side in the width direction of the connection part.
Public/Granted literature
- US20180091066A1 WAFER, PIEZOELECTRIC VIBRATOR ELEMENT, AND PIEZOELECTRIC VIBRATOR Public/Granted day:2018-03-29
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