Invention Grant
- Patent Title: Systems and methods for tuning to reduce reflected power in multiple states
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Application No.: US16542241Application Date: 2019-08-15
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Publication No.: US10651013B2Publication Date: 2020-05-12
- Inventor: Jon McChesney , Alexander Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03H7/38 ; H01J37/244 ; H03H7/40

Abstract:
Systems and methods for tuning to reduce reflected power in multiple states are described. The methods include determining values of one or more parameters of an impedance matching circuit so that reflected power is reduced for multiple states. Such a reduction in the reflected power increases a life of a radio frequency generator coupled to the impedance matching circuit while simultaneously processing a substrate using the multiple states.
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