- 专利标题： System and method for performing nano beam diffraction analysis
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申请号： US16050752申请日： 2018-07-31
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公开(公告)号： US10658154B2公开(公告)日： 2020-05-19
- 发明人: Marc Adam Bergendahl , James John Demarest , Christopher J. Penny , Roger Allen Quon , Christopher Joseph Waskiewicz
- 申请人： International Business Machines Corporation
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 代理机构： McGinn I.P. Law Group, PLLC
- 代理商 Vazken Alexanian
- 主分类号： H01J37/26
- IPC分类号： H01J37/26 ; H01J37/28 ; G01N23/20058
摘要：
A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
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