Invention Grant
- Patent Title: Methods of mitigating cobalt diffusion in contact structures and the resulting devices
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Application No.: US16123042Application Date: 2018-09-06
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Publication No.: US10658176B2Publication Date: 2020-05-19
- Inventor: Frank W. Mont , Han You , Shariq Siddiqui , Brown C. Peethala
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/02 ; H01L21/285

Abstract:
One illustrative method disclosed includes, among other things, forming a first dielectric layer and forming first and second conductive structures comprising cobalt embedded in the first dielectric layer. A second dielectric layer is formed above and contacting the first dielectric layer. The first and second dielectric layers comprise different materials, and a portion of the second dielectric layer comprises carbon or nitrogen. A first cap layer is formed above the first and second conductive structures and the second dielectric layer.
Public/Granted literature
- US20200083040A1 METHODS OF MITIGATING COBALT DIFFUSION IN CONTACT STRUCTURES AND THE RESULTING DEVICES Public/Granted day:2020-03-12
Information query
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