发明授权
- 专利标题: Method for manufacturing a semiconductor component and a semiconductor component
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申请号: US16081768申请日: 2017-03-01
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公开(公告)号: US10658187B2公开(公告)日: 2020-05-19
- 发明人: Hans-Hermann Oppermann , Kai Zoschke , Charles-Alix Manier , Martin Wilke , Tolga Tekin , Robert Gernhardt
- 申请人: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- 申请人地址: DE Munich
- 专利权人: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人地址: DE Munich
- 代理机构: Faegre Drinker Biddle & Reath LLP
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5fea6959
- 国际申请: PCT/EP2017/054727 WO 20170301
- 国际公布: WO2017/148991 WO 20170908
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/304 ; H01L21/56 ; H01L23/00 ; H01L27/146 ; H01L23/538 ; H01L23/13 ; H01L21/768 ; H01L23/482
摘要:
A method for manufacturing a semiconductor component including: providing a flat carrier with an upper side and a lower side, the carrier including a continuous opening that runs between the upper side and the lower side; providing a semiconductor arrangement that includes a semiconductor chip that includes electrically and/or optically active regions on a lower side; arranging the semiconductor arrangement in the opening such that a lower side of the semiconductor arrangement and the lower side of the carrier run in a common plane; casting the semiconductor arrangement with a potting compound, such that the semiconductor arrangement is materially connected to the carrier; and thinning out the semiconductor system by way of grinding from above, such that an upper side of the carrier and an upper side of the semiconductor arrangement run in a common plane.
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