- 专利标题： Shape measuring apparatus and shape measuring method using matched frequency measuring light
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申请号： US16274345申请日： 2019-02-13
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公开(公告)号： US10663288B2公开(公告)日： 2020-05-26
- 发明人: Kazuhiko Tahara
- 申请人： KOBELCO RESEARCH INSTITUTE, INC.
- 申请人地址： JP Kobe-shi
- 专利权人： KOBELCO RESEARCH INSTITUTE, INC.
- 当前专利权人： KOBELCO RESEARCH INSTITUTE, INC.
- 当前专利权人地址： JP Kobe-shi
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ccf3caf
- 主分类号： G01B11/06
- IPC分类号： G01B11/06 ; G01B9/02 ; H04B10/64 ; G02B27/28 ; G01B11/24
摘要：
A shape measuring apparatus of the present invention measures a variation in a thickness of an object to be measured WA based on an A surface reference interference light and an A surface measuring interference light obtained by performing optical heterodyne interference on a first A surface measuring light and a second A surface measuring light and a B surface reference interference light and a B surface measuring interference light obtained by performing the optical heterodyne interference on a first B surface measuring light and a second B surface measuring light. When the optical heterodyne interference is performed, the shape measuring apparatus makes the first A surface measuring light and the second B surface measuring light equal in frequency and makes the first B surface measuring light and the second A surface measuring light equal in frequency.
公开/授权文献
- US20190293407A1 SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD 公开/授权日：2019-09-26
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