- 专利标题: Testing assembly including a multiple degree of freedom stage
-
申请号: US15295196申请日: 2016-10-17
-
公开(公告)号: US10663380B2公开(公告)日: 2020-05-26
- 发明人: Edward Cyrankowski , Syed Amanulla Syed Asif , Ryan Major , Derek Rasugu , Yuxin Feng
- 申请人: Bruker Nano, Inc.
- 申请人地址: US CA Santa Barbara
- 专利权人: Bruker Nano, Inc.
- 当前专利权人: Bruker Nano, Inc.
- 当前专利权人地址: US CA Santa Barbara
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 主分类号: G01N3/04
- IPC分类号: G01N3/04 ; G01N3/42 ; G02B21/26 ; G02B21/32 ; G21K5/10 ; H01J37/20
摘要:
A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages including linear, and one or more of rotation or tilt stages configured to position a sample in a plurality of orientations for access or observation by multiple instruments in a clustered volume that confines movement of the multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes one or more clamping assemblies to statically hold the sample in place throughout observation and with the application of force to the sample, for instance by a mechanical testing instrument. Further, the multiple degree of freedom sample stage includes one or more cross roller bearing assemblies that substantially eliminate mechanical tolerance between elements of one or more stages in directions orthogonal to a moving axis of the respective stages.
公开/授权文献
信息查询