Invention Grant
- Patent Title: Sensor element for a pressure sensor
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Application No.: US15775253Application Date: 2016-10-14
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Publication No.: US10670482B2Publication Date: 2020-06-02
- Inventor: Stefan Zehringer , Zoltan Lestyan , Richard Fix , Jochen Franz , Michaela Mitschke , Tobias Sebastian Frey
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6106c2f4
- International Application: PCT/EP2016/074818 WO 20161014
- International Announcement: WO2017/084819 WO 20170526
- Main IPC: G01L9/08
- IPC: G01L9/08 ; G01L9/00 ; G01L19/00

Abstract:
A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.
Public/Granted literature
- US20180328804A1 SENSOR ELEMENT FOR A PRESSURE SENSOR Public/Granted day:2018-11-15
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