-
公开(公告)号：US10670482B2
公开(公告)日：2020-06-02
申请号：US15775253
申请日：2016-10-14
申请人： Robert Bosch GmbH
发明人： Stefan Zehringer , Zoltan Lestyan , Richard Fix , Jochen Franz , Michaela Mitschke , Tobias Sebastian Frey
摘要： A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.
-
公开(公告)号：US10775253B2
公开(公告)日：2020-09-15
申请号：US16330552
申请日：2017-08-24
申请人： Robert Bosch GmbH
发明人： Heiko Stahl , Arne Dannenberg , Daniel Haug , Daniel Kaercher , Michaela Mitschke , Mike Schwarz , Timo Lindemann
摘要： A method for manufacturing a micromechanical component having a disengaged pressure sensor device includes: configuring an electrically conductive sacrificial element in or on a first outer surface of a first substrate; applying a second substrate on or upon the outer surface of the first substrate over the sacrificial element; configuring a pressure sensor device by anodic etching of the second substrate; configuring in the second substrate at least one trench that extends to the sacrificial element; and at least partly removing the sacrificial element in order to disengage the pressure sensor device.
-
3.发明申请公开(公告)号：US20200225108A1
公开(公告)日：2020-07-16
申请号：US16330552
申请日：2017-08-24
申请人： Robert Bosch GmbH
发明人： Heiko Stahl , Arne Dannenberg , Daniel Haug , Daniel Kaercher , Michaela Mitschke , Mike Schwarz , Timo Lindemann
摘要： A method for manufacturing a micromechanical component having a disengaged pressure sensor device includes: configuring an electrically conductive sacrificial element in or on a first outer surface of a first substrate; applying a second substrate on or upon the outer surface of the first substrate over the sacrificial element; configuring a pressure sensor device by anodic etching of the second substrate; configuring in the second substrate at least one trench that extends to the sacrificial element; and at least partly removing the sacrificial element in order to disengage the pressure sensor device.
-
公开(公告)号：US20180328804A1
公开(公告)日：2018-11-15
申请号：US15775253
申请日：2016-10-14
申请人： Robert Bosch GmbH
发明人： Stefan Zehringer , Zoltan Lestyan , Richard Fix , Jochen Franz , Michaela Mitschke , Tobias Sebastian Frey
CPC分类号： G01L9/085 , G01L9/0052 , G01L19/0092
摘要： A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.
-
公开(公告)号：US09850120B2
公开(公告)日：2017-12-26
申请号：US13761558
申请日：2013-02-07
申请人： Robert Bosch GmbH
发明人： Uwe Schiller , Volkmar Senz , Jochen Franz , Helmut Grutzeck , Michaela Mitschke
CPC分类号： B81B3/0078 , B81C1/00253 , B81C2203/075 , G01L9/0042 , G01L19/0672 , H04R29/00
摘要： Measures are described with the aid of which not only a rupture, but also cracks may be detected in the diaphragm structure of a micromechanical component with the aid of circuit means integrated into the diaphragm structure. At least some circuit elements are integrated for this purpose into the bottom side of the diaphragm, i.e., into a diaphragm area directly adjoining the cavern below the diaphragm.
-
-
-
-
搜索结果
5 条记录 (耗时 0.013 秒)
