Invention Grant
- Patent Title: Microelectromechanical system (MEMS) device readout with optical directional coupler
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Application No.: US15876955Application Date: 2018-01-22
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Publication No.: US10677594B2Publication Date: 2020-06-09
- Inventor: Jan Scheirich , Tomas Neuzil , Martin Vagner
- Applicant: Honeywell International Inc.
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Fogg & Powers LLC
- Main IPC: G01C19/5656
- IPC: G01C19/5656 ; G01C19/5712 ; G01C19/5726 ; G01P15/093 ; G01P15/097 ; G02B6/35 ; G01C19/5733 ; G01C19/5677 ; G01C19/5776 ; G01C19/72 ; G01P3/44

Abstract:
A microelectromechanical systems (MEMS) device comprises an optical directional coupler comprising: a first waveguide having a first and a second end, wherein a light beam is introduced into the first end; a second waveguide having a third and a fourth end, wherein the light beam is evanescently coupled between the two waveguides in the central region; a first photodetector to detect first optical power in the light beam at the second end; and a second photodetector to detect second optical power in the light beam at the fourth end; a vibrating proof mass adjacent to the coupler in a first direction from the coupler, wherein when inertial forces are applied to the MEMS device in a second direction, the proof mass moves in the first direction; a processor to determine the displacement of the proof mass from the coupler as a function of the first and the second optical power.
Public/Granted literature
- US20190226847A1 MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE READOUT WITH OPTICAL DIRECTIONAL COUPLER Public/Granted day:2019-07-25
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