Invention Grant
- Patent Title: Handler bonding and debonding for semiconductor dies
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Application No.: US15935537Application Date: 2018-03-26
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Publication No.: US10679887B2Publication Date: 2020-06-09
- Inventor: Paul S. Andry , Bing Dang , Jeffrey Donald Gelorme , Li-Wen Hung , John U. Knickerbocker , Cornelia Tsang Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Thomas S. Grzesik
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/78

Abstract:
Various embodiments process semiconductor devices. In one embodiment, a release layer is applied to a handler. The release layer comprises at least one additive that adjusts a frequency of electro-magnetic radiation absorption property of the release layer. The additive comprises, for example, a 355 nm chemical absorber and/or chemical absorber for one of more wavelengths in a range comprising 600 nm to 740 nm. The at least one singulated semiconductor device is bonded to the handler. The at least one singulated semiconductor device is packaged while it is bonded to the handler. The release layer is ablated by irradiating the release layer through the handler with a laser. The at least one singulated semiconductor device is removed from the transparent handler after the release layer has been ablated.
Public/Granted literature
- US20180218934A1 HANDLER BONDING AND DEBONDING FOR SEMICONDUCTOR DIES Public/Granted day:2018-08-02
Information query
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