Invention Grant
- Patent Title: MEMS mirror driven by dual pulse drive signal
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Application No.: US15722444Application Date: 2017-10-02
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Publication No.: US10684465B2Publication Date: 2020-06-16
- Inventor: Sivan Kinstlich , Offir Duvdevany
- Applicant: STMicroelectronics Ltd
- Applicant Address: IL Netanya
- Assignee: STMicroelectronics Ltd
- Current Assignee: STMicroelectronics Ltd
- Current Assignee Address: IL Netanya
- Agency: Crowe & Dunlevy
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
Described herein is a device including mirror control circuitry for controlling a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor cause the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.
Public/Granted literature
- US20190101744A1 MEMS MIRROR DRIVEN BY DUAL PULSE DRIVE SIGNAL Public/Granted day:2019-04-04
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