Invention Grant
- Patent Title: Microelectronic devices with through-substrate interconnects and associated methods of manufacturing
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Application No.: US14563953Application Date: 2014-12-08
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Publication No.: US10685878B2Publication Date: 2020-06-16
- Inventor: Kyle K. Kirby , Kunal R. Parekh , Sarah A. Niroumand
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/48 ; H01L23/00 ; H01L25/065 ; H01L25/00 ; H01L21/306 ; H01L21/311

Abstract:
Microelectronic devices with through-substrate interconnects and associated methods of manufacturing are disclosed herein. In one embodiment, a semiconductor device includes a semiconductor substrate carrying first and second metallization layers. The second metallization layer is spaced apart from the semiconductor substrate with the first metallization layer therebetween. The semiconductor device also includes a conductive interconnect extending at least partially through the semiconductor substrate. The first metallization layer is in electrical contact with the conductive interconnect via the second metallization layer.
Public/Granted literature
- US20150093892A1 MICROELECTRONIC DEVICES WITH THROUGH-SUBSTRATE INTERCONNECTS AND ASSOCIATED METHODS OF MANUFACTURING Public/Granted day:2015-04-02
Information query
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