Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16080235Application Date: 2018-04-13
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Publication No.: US10686063B2Publication Date: 2020-06-16
- Inventor: Yi Pei , Chenggong Yin
- Applicant: DYNAX SEMICONDUCTOR, INC.
- Applicant Address: CN Kunshan, Jiangsu Province
- Assignee: DYNAX SEMICONDUCTOR, INC.
- Current Assignee: DYNAX SEMICONDUCTOR, INC.
- Current Assignee Address: CN Kunshan, Jiangsu Province
- Agency: Armstrong Teasdale LLP
- International Application: PCT/CN2018/082993 WO 20180413
- International Announcement: WO2018/188649 WO 20181018
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/778 ; H01L29/417 ; H01L29/205 ; H01L29/20 ; H01L29/47 ; H01L29/423

Abstract:
The present disclosure provides a semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor layer, a source and a drain located on one side of the semiconductor layer, a blocking layer located on one side of the semiconductor layer, the blocking layer including silicide, wherein the distance between an interface at one side of the blocking layer close to the semiconductor layer and the semiconductor layer is equal to or more than 10 nm, and a gate located between the source and the drain, the gate penetrating through the blocking layer, the gate including a first conductive layer and a second conductive layer, the first conductive layer being close to the semiconductor layer, the second conductive layer being located on one side of the first conductive layer away from the semiconductor layer, and the first conductive layer including nickel.
Public/Granted literature
- US20190043977A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-02-07
Information query
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