Invention Grant

Evaporation device
Abstract:
An evaporation device including an evaporation chamber and mask supporting coils is provided. The mask supporting coils include at least a first coil and a second coil disposed opposite to each other. A mask disposing area is disposed between the first coil and the second coil. A first current is provided in the first coil, and a second current is provided in the second coil, so that a magnetic field with a homogeneous magnetic field strength is generated in the mask disposing area.
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