Invention Grant
- Patent Title: Evaporation device
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Application No.: US15487442Application Date: 2017-04-14
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Publication No.: US10689747B2Publication Date: 2020-06-23
- Inventor: Yaoyang Liu , Jian Xu
- Applicant: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD. , TIANMA MICRO-ELECTRONICS CO., LTD.
- Applicant Address: CN Shanghai CN Shenzhen
- Assignee: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.,TIANMA MICRO-ELECTRONICS CO., LTD.
- Current Assignee: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.,TIANMA MICRO-ELECTRONICS CO., LTD.
- Current Assignee Address: CN Shanghai CN Shenzhen
- Agency: Kilpatrick Townsend & Stockton, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@43309d5a
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/04 ; C23C14/24

Abstract:
An evaporation device including an evaporation chamber and mask supporting coils is provided. The mask supporting coils include at least a first coil and a second coil disposed opposite to each other. A mask disposing area is disposed between the first coil and the second coil. A first current is provided in the first coil, and a second current is provided in the second coil, so that a magnetic field with a homogeneous magnetic field strength is generated in the mask disposing area.
Public/Granted literature
- US20170218499A1 EVAPORATION DEVICE Public/Granted day:2017-08-03
Information query
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