Invention Grant
- Patent Title: Hydrogen sensor
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Application No.: US15759343Application Date: 2016-09-16
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Publication No.: US10690606B2Publication Date: 2020-06-23
- Inventor: Toshitsugu Ueda , Hiroshi Oigawa
- Applicant: KOA CORPORATION
- Applicant Address: JP Nagano
- Assignee: KOA CORPORATION
- Current Assignee: KOA CORPORATION
- Current Assignee Address: JP Nagano
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7adda8cc
- International Application: PCT/JP2016/077367 WO 20160916
- International Announcement: WO2017/047728 WO 20170323
- Main IPC: G01N25/22
- IPC: G01N25/22 ; G01N33/00

Abstract:
In order to provide a hydrogen sensor for measuring a hydrogen concentration with high sensitivity and excellent mass-productivity, the hydrogen sensor includes: at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increasing by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.
Public/Granted literature
- US20180252658A1 HYDROGEN SENSOR Public/Granted day:2018-09-06
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