Invention Grant
- Patent Title: Memory structure
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Application No.: US16177812Application Date: 2018-11-01
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Publication No.: US10692875B2Publication Date: 2020-06-23
- Inventor: Wang Xiang , Chia-Ching Hsu , Chun-Sung Huang , Yung-Lin Tseng , Wei-Chang Liu , Shen-De Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@53cb6789
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11524 ; H01L27/11565 ; H01L27/11519 ; H01L27/1157

Abstract:
A memory structure including a substrate, at least one stacked gate structure, a first spacer conductive layer, and a first contact is provided. The stacked gate structure is located on the substrate and includes a control gate. The control gate extends in a first direction. The first spacer conductive layer is located on one sidewall of the control gate and is electrically insulated from the control gate. The first spacer conductive layer includes a first merged spacer portion and a first non-merged spacer portion. A line width of the first merged spacer portion is greater than a line width of the first non-merged spacer portion. The first contact is connected to the first merged spacer portion. The memory structure can have a larger process window of contact.
Public/Granted literature
- US20200119027A1 MEMORY STRUCTURE Public/Granted day:2020-04-16
Information query
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