- 专利标题: Tapered cell profile and fabrication
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申请号: US15893100申请日: 2018-02-09
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公开(公告)号: US10693065B2公开(公告)日: 2020-06-23
- 发明人: Andrea Redaelli , Anna Maria Conti , Agostino Pirovano
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Holland & Hart LLP
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L27/24 ; G11C13/00
摘要:
Methods, systems, and devices for a tapered cell profile and fabrication are described. A memory storage component may contain multiple chalcogenide materials and may include a tapered profile. For example, a first chalcogenide material may be coupled with a second chalcogenide material. Each of the chalcogenide materials may be further coupled with a conductive material (e.g., an electrode). Through an etching process, the chalcogenide materials may tapered (e.g., step tapered). A pulse may be applied to the tapered chalcogenide materials resulting in a memory storage component that includes a mixture of the chalcogenide materials.
公开/授权文献
- US20190252605A1 TAPERED CELL PROFILE AND FABRICATION 公开/授权日:2019-08-15
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