Invention Grant
- Patent Title: Multiple-layer arrangements including one or more dielectric layers over a waveguide
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Application No.: US16165600Application Date: 2018-10-19
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Publication No.: US10698159B2Publication Date: 2020-06-30
- Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: G02B6/136
- IPC: G02B6/136 ; G02B6/122
Abstract:
Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A first dielectric layer comprised of a first silicon nitride is formed. The waveguide is arranged over the first dielectric layer. A second dielectric layer is formed that is arranged over the waveguide. The second dielectric layer is composed of a second silicon nitride having a lower absorption of optical signals than the first silicon nitride.
Public/Granted literature
- US20200124796A1 MULTIPLE-LAYER ARRANGEMENTS INCLUDING ONE OR MORE DIELECTRIC LAYERS OVER A WAVEGUIDE Public/Granted day:2020-04-23
Information query
