Invention Grant
- Patent Title: Processing tool cleaning using laser ablation
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Application No.: US16000801Application Date: 2018-06-05
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Publication No.: US10702895B2Publication Date: 2020-07-07
- Inventor: Ashley C. Tracey , Anthony M. Westren , Kay Y. Blohowiak , Mark R. Brei , Tyler Jacob Zimmerman , Richard C. Barclay , Tara Kovacs Baker , Yuliya Shafranyuk
- Applicant: The Boeing Company
- Applicant Address: US IL Chicago
- Assignee: The Boeing Company
- Current Assignee: The Boeing Company
- Current Assignee Address: US IL Chicago
- Agency: Kwan & Olynick LLP
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B29C33/38

Abstract:
Provided are molds, comprising non-metal base portions and protective optical layers that cover and shield these base portions from laser ablation. For example, a protective optical layer may reflect a laser beam used for ablating the mold. Methods of forming these protective optical layers on non-metal base portions are also provided. In some embodiments, this protective optical layer is the outermost layer exposed to the environment. Alternatively, the protective optical layer may be covered by a release layer. The release layer may be retained or removed during laser ablation. In some embodiments, light emitted by a mold during laser ablation is analyzed to determine performance of its protective optical layer. This feedback may be used to control the laser ablation such as to control orientation of the laser beam relative to the mold.
Public/Granted literature
- US20180290183A1 PROCESSING TOOL CLEANING USING LASER ABLATION Public/Granted day:2018-10-11
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