Invention Grant
- Patent Title: Reaction chamber for chemical vapor apparatus
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Application No.: US15518758Application Date: 2015-10-13
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Publication No.: US10704145B2Publication Date: 2020-07-07
- Inventor: Chul Soo Byun , Man Cheol Han
- Applicant: Korea Institute Of Industrial Technology
- Applicant Address: KR Cheoan-si, Chungcheongnam-Do
- Assignee: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
- Current Assignee Address: KR Cheoan-si, Chungcheongnam-Do
- Agency: Masuvalley & Partners
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5ab19952
- International Application: PCT/KR2015/010757 WO 20151013
- International Announcement: WO2016/060429 WO 20160421
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44 ; H01J37/32 ; C23C16/458 ; C23C16/46

Abstract:
A reaction chamber for a chemical vapor apparatus is disclosed. The reaction chamber for the chemical vapor apparatus comprises a housing including an internal space and a susceptor disposed in the internal space so that a substrate is loaded on an upper surface of the susceptor. A shower head is disposed above the susceptor in the internal space of the housing to spray process gas towards the substrate side. An inner barrel with open top and bottom is placed inside the internal space of the reaction chamber so that an upper edge of the barrel is positioned near the showerhead to enclose the substrate and the susceptor. A driving part is connected to the inner barrel. When it is needed to replace the susceptor and the substrate, the inner barrel is changed into an open state in which the substrate and the susceptor disposed in the inner barrel are exposed to the outside of the inner barrel by an operation of the driving part. The inside of the reaction chamber for the chemical vapor apparatus is always closed and thus the reaction chamber is capable of easily replacing a substrate or a susceptor while the vacuum in the reaction chamber is still maintained.
Public/Granted literature
- US20170233869A1 Reaction Chamber For Chemical Vapor Apparatus Public/Granted day:2017-08-17
Information query
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