Invention Grant
- Patent Title: Particle counter
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Application No.: US16290788Application Date: 2019-03-01
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Publication No.: US10705010B2Publication Date: 2020-07-07
- Inventor: Tomonobu Matsuda , Masaki Shimmura , Mitsuaki Saitou , Yuki Yamakawa
- Applicant: RION Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: RION Co., Ltd.
- Current Assignee: RION Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@62e3894b
- Main IPC: G01N15/14
- IPC: G01N15/14 ; G01N15/02 ; G01N15/06 ; G01N15/00

Abstract:
A particle counter includes a detector that receives, using a light receiving element, interference light between scattered light and reference light, generates a detection signal corresponding to the interference light, and amplifies the detection signal using an amplifier; a counting unit that performs counting of the particle, based on the detection signal in a measurement period for measuring particle; and an optical path length variable unit that causes the optical path length of at least one of a first optical path and a second optical path to be changed at a predetermined rate, wherein the predetermined rate is set based on a flow velocity of the fluid so as to slow a change in a phase difference between the scattered light and the reference light and to make the frequency of the detection signal lower by changing the optical path length.
Public/Granted literature
- US20190277745A1 PARTICLE COUNTER Public/Granted day:2019-09-12
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