Method for detecting surface impurities by X-ray fluorescence analysis
Abstract:
A method for detecting surface impurities on a surface of a component by X-ray fluorescence analysis uses a hand spectroscope for application to the surface of a component. The hand spectroscope comprises an X-ray source, a fluorescent radiation detector, an analyzer and a display. The method comprises irradiating the surface of the component with X-rays using the X-ray source; detecting fluorescent radiation, which is emitted by the surface of the component as a result of the irradiation with the X-rays, using the fluorescent radiation detector; measuring a radiation spectrum of the detected fluorescent radiation; generating an evaluation result by analyzing the measured radiation spectrum using the analyzer, the evaluation result comprising a quantitative measure of the surface impurity of the surface due to predetermined characteristic substances; and outputting the generated evaluation result on the display.
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