Invention Grant
- Patent Title: Gap fill of imprinted structure with spin coated high refractive index material for optical components
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Application No.: US16120733Application Date: 2018-09-04
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Publication No.: US10705268B2Publication Date: 2020-07-07
- Inventor: Jinxin Fu , Ludovic Godet , Wayne McMillan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B29D11/00
- IPC: B29D11/00 ; G02B5/18 ; G03F7/00

Abstract:
Embodiments of the present disclosure generally relate to a method for forming an optical component, for example, for a virtual reality or augmented reality display device. In one embodiment, the method includes forming a first layer on a substrate, and the first layer has a first refractive index. The method further includes pressing a stamp having a pattern onto the first layer, and the pattern of the stamp is transferred to the first layer to form a patterned first layer. The method further includes forming a second layer on the patterned first layer by spin coating, and the second layer has a second refractive index greater than the first refractive index. The second layer having the high refractive index is formed by spin coating, leading to improved nanoparticle uniformity in the second layer.
Public/Granted literature
- US20200003936A1 GAP FILL OF IMPRINTED STRUCTURE WITH SPIN COATED HIGH REFRACTIVE INDEX MATERIAL FOR OPTICAL COMPONENTS Public/Granted day:2020-01-02
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