Invention Grant
- Patent Title: Methods of forming semiconductor structures
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Application No.: US16121966Application Date: 2018-09-05
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Publication No.: US10707298B2Publication Date: 2020-07-07
- Inventor: Michael Mutch , Manuj Nahar , Wayne I. Kinney
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L29/04 ; H01L21/02 ; H01L29/161 ; H01L21/324 ; H01L29/786 ; H01L27/105

Abstract:
A method includes forming a semiconductor structure. The structure includes a first material, a blocking material, a second material in an amorphous form, and a third material in an amorphous form. The blocking material is disposed between the first material and the second material. At least the second material and the third material each comprise silicon and/or germanium. The structure is exposed to a temperature above a crystallization temperature of the third material and below a crystallization temperature of the second material. Semiconductor structures, memory devices, and systems are also disclosed.
Public/Granted literature
- US20200075713A1 METHODS OF FORMING SEMICONDUCTOR STRUCTURES Public/Granted day:2020-03-05
Information query
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