- Patent Title: Method of forming smooth sidewall structures using spacer materials
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Application No.: US16171477Application Date: 2018-10-26
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Publication No.: US10714380B2Publication Date: 2020-07-14
- Inventor: Ravi P. Srivastava , Sipeng Gu , Sunil K. Singh , Xinyuan Dou , Akshey Sehgal , Zhiguo Sun
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to smooth sidewall structures and methods of manufacture. The method includes: forming a plurality of mandrel structures; forming a first spacer material on each of the plurality of mandrel structures; forming a second spacer material over the first spacer material; and removing the first spacer material and the plurality of mandrel structures to form a sidewall structure having a sidewall smoothness greater than the plurality of mandrel structures.
Public/Granted literature
- US20200135545A1 SMOOTH SIDEWALL STRUCTURES Public/Granted day:2020-04-30
Information query
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