- Patent Title: Virtual negative bevel and methods of isolating adjacent devices
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Application No.: US16699858Application Date: 2019-12-02
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Publication No.: US10720544B2Publication Date: 2020-07-21
- Inventor: Eric Harmon
- Applicant: LightSpin Technologies Inc.
- Applicant Address: US NY Endicott
- Assignee: LightSpin Technologies Inc.
- Current Assignee: LightSpin Technologies Inc.
- Current Assignee Address: US NY Endicott
- Agency: Intrinsic Law Corp.
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L27/14 ; H01L27/142 ; H01L31/02 ; H01L27/144 ; H01L31/0352 ; H01L31/18 ; H01L27/146

Abstract:
This disclosure is directed to devices and systems and methods comprising virtual negative beveled facets including to isolate adjacent devices from one another. Aspects hereof are directed to integrated photon detectors or photodetector devices incorporating implant isolation mesas and resistors, and in particular to methods and structures for isolating such detectors or devices from neighboring detectors or devices.
Public/Granted literature
- US20200105959A1 VIRTUAL NEGATIVE BEVEL AND METHODS OF ISOLATING ADJACENT DEVICES Public/Granted day:2020-04-02
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