- 专利标题: Inspection apparatus and inspection method
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申请号: US15687924申请日: 2017-08-28
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公开(公告)号: US10724942B2公开(公告)日: 2020-07-28
- 发明人: Masato Akita , Takamitsu Sunaoshi , Misato Ishikawa
- 申请人: Kabushiki Kaisha Toshiba
- 申请人地址: JP Minato-ku
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2641c279
- 主分类号: G01N21/13
- IPC分类号: G01N21/13 ; B07C5/36 ; G01N35/00 ; G01N21/07
摘要:
According to one embodiment, an inspection apparatus includes a socket, a first arm, and a recognition device. The socket has at least one container holding part for holding a container containing an object. The first arm includes at least two links of which ends are connected. The first arm is able to install the container into the container holding part when the links are in a first posture and to reinstall the container into the container holding part when the links are in a second posture different from the first posture. The recognition device obtains at least recognition results indicating respective positions of the object when the container is installed into the container holding part in the first posture and the second posture.
公开/授权文献
- US20180231456A1 INSPECTION APPARATUS AND INSPECTION METHOD 公开/授权日:2018-08-16
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