Invention Grant
- Patent Title: Extreme ultraviolet absorbing alloys
-
Application No.: US16107343Application Date: 2018-08-21
-
Publication No.: US10731234B2Publication Date: 2020-08-04
- Inventor: Hanns Christoph Adelmann , Vicky Philipsen , Kim Vu Luong
- Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee Address: BE Leuven BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@51409c2c
- Main IPC: G03F1/54
- IPC: G03F1/54 ; C22C19/03 ; C22C5/04 ; C22C12/00 ; C22C19/07 ; C22C28/00 ; C22C45/00 ; G03F1/24 ; C22C45/04

Abstract:
Example embodiments relate to extreme ultraviolet absorbing alloys. One example embodiment includes an alloy. The alloy includes one or more first elements selected from: a first list consisting of: Ag, Ni, Co, and Fe; and a second list consisting of: Ru, Rh, Pd, Os, Ir, and Pt. The alloy also includes one or more second elements selected from: the first list, if the one or more first elements are not selected from the first list; and a third list consisting of Sb and Te. An atomic ratio between the one or more first elements and the one or more second elements is between 1:1 and 1:5 if the one or more second elements are selected from the third list and between 1:1 and 1:19 if the one or more second elements are not selected from the third list.
Public/Granted literature
- US20190078177A1 Extreme Ultraviolet Absorbing Alloys Public/Granted day:2019-03-14
Information query