Invention Grant
- Patent Title: Gate-all-around transistor with spacer support and methods of forming same
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Application No.: US15920886Application Date: 2018-03-14
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Publication No.: US10734525B2Publication Date: 2020-08-04
- Inventor: Ruilong Xie , Julien Frougier , Christopher M. Prindle , Nigel G. Cave
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/06 ; H01L29/66 ; H01L29/423

Abstract:
The disclosure relates to gate-all-around (GAA) transistors with a spacer support, and related methods. A GAA transistor according to embodiments of the disclosure includes: at least one semiconductor channel structure extending between a source terminal and a drain terminal; a spacer support having a first portion thereof positioned underneath and a second portion thereof positioned alongside a first portion of the at least one semiconductor channel structure; and a gate metal surrounding a second portion of the at least one semiconductor channel structure between the source and drain terminals; wherein the spacer support is positioned between the gate metal and the source or drain terminal.
Public/Granted literature
- US20190288117A1 GATE-ALL-AROUND TRANSISTOR WITH SPACER SUPPORT AND METHODS OF FORMING SAME Public/Granted day:2019-09-19
Information query
IPC分类: